Why Semiconductor Factory Needs High-Purity Fluid System?

Semiconductor manufacturing requires extremely high standards for environmental cleanliness and material purity, necessitating the use of High Purity Fluid Systems (HPFS) to transport ultrapure water, chemical reagents, and high-purity gases.

This system ensures that the fluid remains uncontaminated during transportation, thereby guaranteeing the stability and yield of chip manufacturing.

High-purity fluid systems typically consist of the following components:

High-purity piping (PFA/PTFE tubing)

high purity valve and fitting

filter system

Ultra-pure water system (UPW)

These systems are widely used in wafer fabrication, lithography, cleaning and chemical etching.

What is a high-purity fluid system?

A High Purity Fluid System (HPFS) is a specialized pipeline system designed for transporting high-purity liquids or gases, effectively minimizing contamination from particulates, metal ions, and organic compounds.

In semiconductor manufacturing, even trace impurities can degrade chip performance, requiring high-purity materials and cleanroom design to maintain fluid purity.

High-purity fluid systems typically exhibit the following characteristics:

ultrafine particle release

extremely low metal ion precipitation

high corrosion resistance

smooth inner wall design

Requirements of Semiconductor Manufacturing for Fluid Purity

The semiconductor process has very strict requirements on the purity of the fluid, mainly because of the following aspects.

1 Prevent chip contamination

The chip manufacturing process involves nano-scale structures. If the fluid contains tiny particles or metal ions, it may lead to:

short circuited

chip defect

product yield decline

Therefore, high purity materials must be used to transport chemicals.

2 Ensuring Stability of Lithography and Etching Processes

High-purity chemical reagents are required during lithography and etching processes, such as:

photoresist developer

acidic etching solution

Cleaning chemicals

If the fluid purity is insufficient, it will directly affect the wafer surface quality.

3 Meet the requirements of the ultrapure water system

The semiconductor manufacturing industry requires a substantial amount of ultrapure water (UPW) for cleaning processes.

Ultra-pure water is commonly used for:

wafer cleaning

Equipment cleaning

Process rinse

The system must be free from contamination, as the purity requirements are extremely high.

Key Components of High-Purity Fluid Systems

A complete high purity fluid system usually includes several core components.

high purity pipe

High-purity pipelines typically use the following materials:

PFA Guan

PTFE Guan

PVDF Guan

The materials have good corrosion resistance and low pollution characteristics.

high purity valve and fitting

High-purity valves and fittings for connecting different pipeline systems must meet the following requirements:

high airtightness

low particle release

high corrosion resistance

Common materials include PFA and PTFE.

high purity filtration system

The filtration system is designed to remove particles and impurities from fluids, with standard filtration precision typically reaching:

0.05 μm

0.02 μm

This is crucial for semiconductor manufacturing.

Application of High-purity Materials in Semiconductor Industry

In the semiconductor industry, common high-purity materials include:

PFA material

characteristic ：

very low pollution

excellent chemical corrosion resistance

excellent high temperature stability

It is widely used in high purity chemical transportation system.

PTFE material

characteristic ：

excellent corrosion resistance

low friction coefficient

thermostability

It is often used in high-purity fluid pipelines and hoses.

Development Trend of High-purity Fluid System

With the continuous advancement of semiconductor technology, chip manufacturing process nodes are becoming progressively smaller, such as 7nm, 5nm, and 3nm.

This means that the manufacturing environment has higher and higher requirements for purity.

The future development directions of high-purity fluid systems include:

lower particle release material

Higher-purity chemical conveying system

higher cleanliness design

intelligent monitoring system

frequently asked questions FAQ

What is a high-purity fluid system?

High purity fluid system is a kind of pipeline system for transporting high purity liquid or gas, which can reduce the particle and impurity pollution, and is widely used in semiconductor manufacturing industry.

Why Semiconductor Factory Needs High-Purity Fluid System?

Since semiconductor manufacturing is highly sensitive to contamination, even trace impurities can compromise chip quality, necessitating high-purity fluid systems to maintain the purity of chemicals and ultrapure water.

What are the common materials used for high-purity semiconductor pipelines?

Common materials include: PFA, PTFE, PVDF

These materials exhibit excellent corrosion resistance and low pollution characteristics.

sum up

High purity fluid system is an important infrastructure in semiconductor manufacturing, which can ensure the high purity of chemicals and ultrapure water in the process of transportation, so as to ensure the stability and yield of chip production.

With the continuous advancement of semiconductor manufacturing processes, high-purity fluid systems will play an increasingly vital role in future production.

About Us

This article is compiled and released by Shanghai Cunjian Fluid Technology Co., Ltd. The company specializes in industrial fluid transportation solutions, with products including PFA/PTFE high-purity pipelines, food-grade hoses, and various fluid connection components, which are widely used in the semiconductor, pharmaceutical, and food industries.