1.Introduction

In semiconductor manufacturing, high purity fluid systems (UHP systems) are critical. Materials used in these systems must meet extremely strict requirements.

This is why fluoropolymer tubing and fittings (PTFE, PFA) are widely used.

2. Key Reasons for Using Fluoropolymer Materials

1. Ultra-High Purity

Low extractables

No metal ion contamination

Essential for wafer yield and process stability.

2. Excellent Chemical Resistance

Fluoropolymers can withstand:

Strong acids (HF, H₂SO₄, HNO₃)

Organic solvents

3. Low Extractables and Adsorption

Prevent contamination

Maintain fluid purity

4. Smooth Inner Surface

Reduces particle generation

Improves flow performance

5. High Temperature Resistance

Up to ~260°C

Long service life

3. Applications

Ultra-pure water (UPW) systems

Chemical delivery systems

Wet processing equipment

CMP systems

4. PFA vs PTFE

PFA: higher purity, better for semiconductors

PTFE: widely used in chemical industry

5. FAQ

Why not use metal pipes?

They may release ions and cause contamination.

Why is PFA preferred?

Higher purity and lower extractables.

6. Conclusion

Fluoropolymer tubing is essential in semiconductor manufacturing due to its purity, chemical resistance, and stability.

CJan Fluid Technology Co., Ltd. provides high purity fluoropolymer tubing and fluid system solutions for semiconductor applications.